Abstract
Selenium doped Ga0.51In0.49P films have been grown by metalorganic chemical vapour deposition at 600, 670 and 740° C. The extent of ordering of the Group III sublattice has been monitored by transmission electron microscopy. Ordering disappears at carrier concentrations on the order of 1018 cm-3 for samples grown at 600 and 740° C although a small degree of ordering persists in the samples grown at 670° C up to a carrier concentration of 1019 cm-3. At each growth temperature, the ordering observed decreased and the bandgap measured increased with increasing Se doping.
| Original language | American English |
|---|---|
| Pages (from-to) | 95-99 |
| Number of pages | 5 |
| Journal | Journal of Electronic Materials |
| Volume | 19 |
| Issue number | 1 |
| DOIs | |
| State | Published - Jan 1990 |
NLR Publication Number
- ACNR/JA-213-11545
Keywords
- GaInP
- MOCVD
- ordering
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