Abstract
A novel heteroepitaxial growth technique, quasi-van der Waals epitaxy, promises the ability to deposit three-dimensional GaAs materials on silicon using two-dimensional graphene as a buffer layer by overcoming the lattice and thermal expansion mismatch. In this study, density functional theory (DFT) simulations were performed to understand the interactions at the GaAs/graphene hetero-interface as well as the growth orientations of GaAs on graphene. To develop a better understanding of the molecular beam epitaxy-grown GaAs films on graphene, samples were characterized by x-ray diffraction (θ-2θ scan, ω-scan, grazing incidence XRD and pole figure measurement) and transmission electron microscopy. The realizations of smooth GaAs films with a strong (111) oriented fiber-texture on graphene/silicon using this deposition technique are a milestone towards an eventual demonstration of the epitaxial growth of GaAs on silicon, which is necessary for integrated photonics application.
| Original language | American English |
|---|---|
| Pages (from-to) | 268-273 |
| Number of pages | 6 |
| Journal | Journal of Crystal Growth |
| Volume | 425 |
| DOIs | |
| State | Published - 2015 |
Bibliographical note
Publisher Copyright:© 2015 Elsevier B.V. All rights reserved.
NLR Publication Number
- NREL/JA-5K00-64920
Keywords
- A3. Molecular beam epitaxy
- A3. Thin film
- B2. Semiconducting gallium arsenide
- B2. Semiconducting III-V materials
- B2. Semiconducting silicon
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