Residual Stress and the Effect of Implanted Argon in Films of Zirconium Nitride Made by Physical Vapor Deposition

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	1446-1452
Number of pages	7
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	10
Issue number	4
DOIs	https://doi.org/10.1116/1.578263
State	Published - 1992

NLR Publication Number

@article{b5fbbd0c88b7457081ac9b31e69ca107,

title = "Residual Stress and the Effect of Implanted Argon in Films of Zirconium Nitride Made by Physical Vapor Deposition",

author = "NREL",

year = "1992",

doi = "10.1116/1.578263",

language = "American English",

volume = "10",

pages = "1446--1452",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4",

}

TY - JOUR

T1 - Residual Stress and the Effect of Implanted Argon in Films of Zirconium Nitride Made by Physical Vapor Deposition

AU - NREL, null

PY - 1992

Y1 - 1992

U2 - 10.1116/1.578263

DO - 10.1116/1.578263

M3 - Article

SN - 0734-2101

VL - 10

SP - 1446

EP - 1452

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

ER -