Remote Plasma Hydrogenation of Ion Beam Amorphized Silicon

Research output: Contribution to journal › Article

NLR Publication Number

@article{9ec977a1da904592bada2730be85f163,

title = "Remote Plasma Hydrogenation of Ion Beam Amorphized Silicon",

author = "NREL",

year = "1991",

doi = "10.1063/1.105375",

language = "American English",

volume = "59",

pages = "718--720",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "6",

}