Real-Time Spectroscopic Ellipsometry Studies of Zinc Oxide Deposition: Paper No. 1074-I07-11

Research output: Contribution to conference › Paper

Original language	American English
Pages	52-57
Number of pages	6
State	Published - 2008
Event	Synthesis and Metrology of Nanoscale Oxides and Thin Films - San Francisco, California Duration: 24 Mar 2008 → 28 Mar 2008

Conference	Synthesis and Metrology of Nanoscale Oxides and Thin Films
City	San Francisco, California
Period	24/03/08 → 28/03/08

NLR Publication Number

@conference{ff095ae2f1ef4314974da5f503d9fd55,

title = "Real-Time Spectroscopic Ellipsometry Studies of Zinc Oxide Deposition: Paper No. 1074-I07-11",

keywords = "basic sciences, materials science",

author = "Bobby To",

year = "2008",

language = "American English",

pages = "52--57",

note = "Synthesis and Metrology of Nanoscale Oxides and Thin Films ; Conference date: 24-03-2008 Through 28-03-2008",

}