Rapid Low-Temperature Epitaxial Growth Using a Hot-Element Assisted Chemical Vapor Deposition Process

Research output: Patent

NLR Publication Number

@misc{0cc05156d9eb4df09495e77113224524,

title = "Rapid Low-Temperature Epitaxial Growth Using a Hot-Element Assisted Chemical Vapor Deposition Process",

author = "NREL",

year = "2001",

language = "American English",

publisher = "National Laboratory of the Rockies (NLR)",

address = "United States",

type = "Patent",

note = "6,251,183 B1",

}