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Quality and Growth Rate of Hot-Wire Chemical Vapor Deposition Epitaxial Si Layers: Paper No. 1066-A11-06

  • Kim Jones
  • , Kim Jones
  • , Ina Martin
  • , Charles Teplin
    • National Renewable Energy Laboratory

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Pages285-289
    Number of pages5
    StatePublished - 2008
    EventAmorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2008: Materials Research Society Symposium - San Francisco, California
    Duration: 25 Mar 200828 Mar 2008

    Conference

    ConferenceAmorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2008: Materials Research Society Symposium
    CitySan Francisco, California
    Period25/03/0828/03/08

    NLR Publication Number

    • NREL/CP-520-43193

    Keywords

    • HWCVD
    • silicon films
    • solar cells

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