Preparation and Characterization of Undoped ZnO TCO Films by Electron-Beam Evaporation and Activated Plasma Deposition Techniques

Research output: Contribution to conference › Paper

Original language	American English
Pages	1452-1456
Number of pages	5
DOIs	https://doi.org/10.1109/pvsc.2009.5411321
State	Published - 2009
Event	34th IEEE Photovoltaic Specialists Conference (PVSC '09) - Philadelphia, Pennsylvania Duration: 7 Jun 2009 → 12 Jun 2009

Conference	34th IEEE Photovoltaic Specialists Conference (PVSC '09)
City	Philadelphia, Pennsylvania
Period	7/06/09 → 12/06/09

NLR Publication Number

Falcão, V., Miranda, D., Sabino, M. E., Diniz, A. S. A. C., Branco, J. R., & Xu, Y. (2009). Preparation and Characterization of Undoped ZnO TCO Films by Electron-Beam Evaporation and Activated Plasma Deposition Techniques. 1452-1456. Paper presented at 34th IEEE Photovoltaic Specialists Conference (PVSC '09), Philadelphia, Pennsylvania. https://doi.org/10.1109/pvsc.2009.5411321

@conference{9e845499fbc54a28afcecd8556fac30a,

title = "Preparation and Characterization of Undoped ZnO TCO Films by Electron-Beam Evaporation and Activated Plasma Deposition Techniques",

keywords = "electron beam, plasma deposition",

author = "V. Falc{\~a}o and D. Miranda and M.E. Sabino and A.S.A.C Diniz and J.R. Branco and Yueqin Xu",

year = "2009",

doi = "10.1109/pvsc.2009.5411321",

language = "American English",

pages = "1452--1456",

note = "34th IEEE Photovoltaic Specialists Conference (PVSC \'09) ; Conference date: 07-06-2009 Through 12-06-2009",

}

Falcão, V, Miranda, D, Sabino, ME, Diniz, ASAC, Branco, JR & Xu, Y 2009, 'Preparation and Characterization of Undoped ZnO TCO Films by Electron-Beam Evaporation and Activated Plasma Deposition Techniques', Paper presented at 34th IEEE Photovoltaic Specialists Conference (PVSC '09), Philadelphia, Pennsylvania, 7/06/09 - 12/06/09 pp. 1452-1456. https://doi.org/10.1109/pvsc.2009.5411321

TY - CONF

T1 - Preparation and Characterization of Undoped ZnO TCO Films by Electron-Beam Evaporation and Activated Plasma Deposition Techniques

AU - Falcão, V.

AU - Miranda, D.

AU - Sabino, M.E.

AU - Diniz, A.S.A.C

AU - Branco, J.R.

AU - Xu, Yueqin

PY - 2009

Y1 - 2009

KW - electron beam

KW - plasma deposition

U2 - 10.1109/pvsc.2009.5411321

DO - 10.1109/pvsc.2009.5411321

M3 - Paper

SP - 1452

EP - 1456

T2 - 34th IEEE Photovoltaic Specialists Conference (PVSC '09)

Y2 - 7 June 2009 through 12 June 2009

ER -