Precise, Non-Degrading Etching of Superconducting Circuits: NREL Scientist Uses Simple Acids in Sophisticated Technique for Making Microelectronic Parts

Precise, Non-Degrading Etching of Superconducting Circuits: NREL Scientist Uses Simple Acids in Sophisticated Technique for Making Microelectronic Parts

NREL

Research output: NLR › Marketing

Original language	American English
Publisher	National Laboratory of the Rockies (NLR)
Number of pages	4
State	Published - 1993

NLR Publication Number

NREL/MK-336-5678

Cite this

@misc{00c6fb5433644b5680e37d69e4cb50fa,

title = "Precise, Non-Degrading Etching of Superconducting Circuits: NREL Scientist Uses Simple Acids in Sophisticated Technique for Making Microelectronic Parts",

author = "NREL",

year = "1993",

language = "American English",

publisher = "National Laboratory of the Rockies (NLR)",

address = "United States",

type = "Other",

}