Plasma-Assisted CVD of Fluorinated, Hydrogenated Amorphous Silicon

Research output: NLR › Subcontract Report

Original language	American English
Publisher	National Laboratory of the Rockies (NLR)
State	Published - 1981

Work performed by Plasma Physics Corp., Locust Valley, New York

NLR Publication Number

@misc{56123dec3af84a18a62aba9206d17dc7,

title = "Plasma-Assisted CVD of Fluorinated, Hydrogenated Amorphous Silicon",

author = "NREL",

note = "Work performed by Plasma Physics Corp., Locust Valley, New York",

year = "1981",

language = "American English",

publisher = "National Laboratory of the Rockies (NLR)",

address = "United States",

type = "Other",

}