| Original language | American English |
|---|---|
| Number of pages | 8 |
| Journal | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics |
| Volume | 31 |
| Issue number | 5 |
| DOIs | |
| State | Published - 2013 |
NLR Publication Number
- NREL/JA-5900-60815
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