@article{330eaddf856a41f8aa174005ff115439,
title = "Optical Emission Study of the Glow-Discharge Deposition of Hydrogenated Amorphous Silicon from Argon-Silane Mixtures",
author = "NREL",
note = "Work performed by Division of Metallurgy and Materials Science, Brookhaven National Laboratory, Upton, New York",
year = "1983",
doi = "10.1063/1.332382",
language = "American English",
volume = "54",
pages = "2276--2280",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "5",
}