Monitoring and Modeling Silicon Homoepitaxy Breakdown with Real-Time Spectroscopic Ellipsometry: Article No. 103536

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NLR Publication Number

@article{730937ee74af4abfb2168da88f452504,

title = "Monitoring and Modeling Silicon Homoepitaxy Breakdown with Real-Time Spectroscopic Ellipsometry: Article No. 103536",

author = "NREL",

year = "2005",

doi = "10.1063/1.1903110",

language = "American English",

volume = "97",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "10",

}