Abstract
Ferroelectric loaded line phase shifters operating at millimeter waves for phased array antenna applications are presented. Phase shifters were manufactured on using Ba 0.3Sr 0.7TiO 3 thin films. The magnetron sputtering process was used to fabricate these Ba 0.3Sr 0.7TiO 3 ferroelectric films with a thickness ∼1 μm. The phase shifter operating at V-band (60 GHz) demonstrated continuous phase shift up to 220 deg and figure of merit (FOM) 22 deg/dB. The phase shifter operating at Ka-band (30 GHz) showed phase shift up to 360 deg and FOM 40 deg/dB.
| Original language | American English |
|---|---|
| Pages (from-to) | 847-852 |
| Number of pages | 6 |
| Journal | Integrated Ferroelectrics |
| Volume | 55 |
| Issue number | 1 |
| DOIs | |
| State | Published - 2003 |
NLR Publication Number
- NREL/JA-520-36764
Keywords
- Ferroelectric thin films
- Microwave devices
- Phase shifters
- Tunable
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