Migration of Hydrogen in Silicon from PECVD SiNx Films

Research output: Contribution to conference › Paper

Original language	American English
Pages	194-198
Number of pages	5
State	Published - 2008
Event	18th Workshop on Crystalline Silicon Solar Cells and Modules: Materials and Processes - Vail, Colorado Duration: 3 Aug 2008 → 6 Aug 2008

Conference	18th Workshop on Crystalline Silicon Solar Cells and Modules: Materials and Processes
City	Vail, Colorado
Period	3/08/08 → 6/08/08

NLR Publication Number

@conference{34f8dc72405e43d886c4350c9c13ac8d,

title = "Migration of Hydrogen in Silicon from PECVD SiNx Films",

keywords = "hydrogen, thin films",

author = "Manav Shearon and Kim, \{Dong Seop\} and Ajeet Rohatgi and H.F.W Dekkers and S.E. Asher and Matthew Young and G. Beaucarne",

year = "2008",

language = "American English",

pages = "194--198",

note = "18th Workshop on Crystalline Silicon Solar Cells and Modules: Materials and Processes ; Conference date: 03-08-2008 Through 06-08-2008",

}

TY - CONF

T1 - Migration of Hydrogen in Silicon from PECVD SiNx Films

AU - Shearon, Manav

AU - Kim, Dong Seop

AU - Rohatgi, Ajeet

AU - Dekkers, H.F.W

AU - Asher, S.E.

AU - Young, Matthew

AU - Beaucarne, G.

PY - 2008

Y1 - 2008

KW - hydrogen

KW - thin films

M3 - Paper

SP - 194

EP - 198

T2 - 18th Workshop on Crystalline Silicon Solar Cells and Modules: Materials and Processes

Y2 - 3 August 2008 through 6 August 2008

ER -