Method for Producing High Carrier Concentration P-Type Transparent Conducting Oxides

A method for producing transparent p-type conducting oxide films without co-doping plasma enhancement or high temperature comprising: a) introducing a dialkyl metal at ambient temperature and a saturated pressure in a carrier gas into a low pressure deposition chamber, and b) introducing NO alone or with an oxidizer into the chamber under an environment sufficient to produce a metal-richcondition to enable NO decomposition and atomic nitrogen incorporation into the formed transparent metal conducting oxide.