Method and Apparatus for Removing and Preventing Window Deposition during Photochemical Vapor Deposition (Photo-CVD) Processes

Research output: Patent

NLR Publication Number

@misc{477f93840e97422d94a88411a2171888,

title = "Method and Apparatus for Removing and Preventing Window Deposition during Photochemical Vapor Deposition (Photo-CVD) Processes",

author = "NREL",

year = "1989",

language = "American English",

publisher = "National Laboratory of the Rockies (NLR)",

address = "United States",

type = "Patent",

note = "4,816,294",

}