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Measurement and Use of Plasma Current Waveform in an RF Silane Discharge

    Research output: Contribution to conference › Paper

    Original languageAmerican English
    Pages410-413
    Number of pages4
    StatePublished - 1981
    EventThird Symposium on Plasma Processing - Denver, Colorado
    Duration: 1 Jan 1981 → 1 Jan 1981

    Conference

    ConferenceThird Symposium on Plasma Processing
    CityDenver, Colorado
    Period1/01/81 → 1/01/81

    NLR Publication Number

    • ACNR/CP-6246

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