Measurement and Reduction of Water Vapor Content in AsH3 and PH3 Source

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	921-922
Number of pages	2
Journal	Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena
Volume	3
Issue number	3
DOIs	https://doi.org/10.1116/1.583083
State	Published - 1985

Work performed by Chevron Research Company, Richmond, California

NLR Publication Number

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title = "Measurement and Reduction of Water Vapor Content in AsH3 and PH3 Source",

author = "NREL",

note = "Work performed by Chevron Research Company, Richmond, California",

year = "1985",

doi = "10.1116/1.583083",

language = "American English",

volume = "3",

pages = "921--922",

journal = "Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena",

issn = "0734-211X",

number = "3",

}

TY - JOUR

T1 - Measurement and Reduction of Water Vapor Content in AsH3 and PH3 Source

AU - NREL, null

N1 - Work performed by Chevron Research Company, Richmond, California

PY - 1985

Y1 - 1985

U2 - 10.1116/1.583083

DO - 10.1116/1.583083

M3 - Article

SN - 0734-211X

VL - 3

SP - 921

EP - 922

JO - Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena

JF - Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena

IS - 3

ER -