@article{cc277f2d72e24a9ca017fd1e49b92387,
title = "Mass Spectrometric Studies of Impurities in Silane and Their Effects on the Electronic Properties of Hydrogenated Amorphous Silicon",
author = "NREL",
note = "Work performed by Division of Metallurgy and Materials Science, Brookhaven National Laboratory, Upton, New York",
year = "1983",
doi = "10.1063/1.332577",
language = "American English",
volume = "54",
pages = "3987--3992",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "7",
}