Low Temperature Plasma-Assisted Deposition Process for Microcrystalline Thin Film Transistors, TFTs

Low Temperature Plasma-Assisted Deposition Process for Microcrystalline Thin Film Transistors, TFTs

NREL

Research output: Contribution to conference › Paper

Original language	American English
Pages	53-58
Number of pages	6
State	Published - 1994
Event	Flat Panel Display Materials: Materials Research Society Symposium - San Francisco, California Duration: 5 Apr 1994 → 6 Apr 1994

Conference

Conference	Flat Panel Display Materials: Materials Research Society Symposium
City	San Francisco, California
Period	5/04/94 → 6/04/94

Bibliographical note

Work performed by the Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina

NLR Publication Number

ACNR/CP-16077

Cite this

@conference{ab23c7dabc3b42aa84b7b43dc25eb56b,

title = "Low Temperature Plasma-Assisted Deposition Process for Microcrystalline Thin Film Transistors, TFTs",

author = "NREL",

note = "Work performed by the Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina; Flat Panel Display Materials: Materials Research Society Symposium ; Conference date: 05-04-1994 Through 06-04-1994",

year = "1994",

language = "American English",

pages = "53--58",

}

TY - CONF

T1 - Low Temperature Plasma-Assisted Deposition Process for Microcrystalline Thin Film Transistors, TFTs

AU - NREL, null

N1 - Work performed by the Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina

PY - 1994

Y1 - 1994

M3 - Paper

SP - 53

EP - 58

T2 - Flat Panel Display Materials: Materials Research Society Symposium

Y2 - 5 April 1994 through 6 April 1994

ER -