Low-Temperature Diffusivity of Hydrogen in Different Silicon Substrates

Low-Temperature Diffusivity of Hydrogen in Different Silicon Substrates

NREL

Research output: Contribution to conference › Paper

Original language	American English
Pages	359-364
Number of pages	6
State	Published - 1995
Event	Defect and Impurity Engineered Semiconductors and Devices: Materials Research Society Symposium - San Francisco, California Duration: 17 Apr 1995 → 21 Apr 1995

Conference

Conference	Defect and Impurity Engineered Semiconductors and Devices: Materials Research Society Symposium
City	San Francisco, California
Period	17/04/95 → 21/04/95

NLR Publication Number

ACNR/CP-413-16475

Cite this

@conference{6a9e46d390a445c28fd7075709848ceb,

title = "Low-Temperature Diffusivity of Hydrogen in Different Silicon Substrates",

author = "NREL",

year = "1995",

language = "American English",

pages = "359--364",

note = "Defect and Impurity Engineered Semiconductors and Devices: Materials Research Society Symposium ; Conference date: 17-04-1995 Through 21-04-1995",

}