Low-Temperature Deposition of Low Resistivity ZnSe Films by Reactive Sputtering

Research output: Contribution to journal › Article

Work performed by Jet Propulsion Laboratory, Pasadena, California

NLR Publication Number

@article{3d185513c117479b806c3f63568f8a50,

title = "Low-Temperature Deposition of Low Resistivity ZnSe Films by Reactive Sputtering",

author = "NREL",

note = "Work performed by Jet Propulsion Laboratory, Pasadena, California",

year = "1986",

doi = "10.1063/1.96788",

language = "American English",

volume = "48",

pages = "1790--1792",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "26",

}

TY - JOUR

T1 - Low-Temperature Deposition of Low Resistivity ZnSe Films by Reactive Sputtering

AU - NREL, null

N1 - Work performed by Jet Propulsion Laboratory, Pasadena, California

PY - 1986

Y1 - 1986

U2 - 10.1063/1.96788

DO - 10.1063/1.96788

M3 - Article

SN - 0003-6951

VL - 48

SP - 1790

EP - 1792

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 26

ER -