Liquid Precursor for Deposition of Indium Selenide and Method of Preparing the Same

Calvin Curtis; David Ginley; Alexander Miedaner; Marinus Antonius; Maria Hest; Louay Eldada; Billy Stanbery

Liquid Precursor for Deposition of Indium Selenide and Method of Preparing the Same

Calvin Curtis (Inventor)
, David Ginley (Inventor)
, Alexander Miedaner (Inventor)
, Marinus Antonius (Inventor)
, Maria Hest (Inventor)
, Louay Eldada (Inventor)
, Billy Stanbery (Inventor)

Research output: Patent

Abstract

Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.

Original language	American English
Patent number	9,142,408 B2
Filing date	22/09/15
State	Published - 2015

NLR Publication Number

NREL/PT-5900-65251

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Cite this

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title = "Liquid Precursor for Deposition of Indium Selenide and Method of Preparing the Same",

abstract = "Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.",

author = "Calvin Curtis and David Ginley and Alexander Miedaner and Marinus Antonius and Maria Hest and Louay Eldada and Billy Stanbery",

year = "2015",

language = "American English",

type = "Patent",

note = "9,142,408 B2",

}

TY - PAT

T1 - Liquid Precursor for Deposition of Indium Selenide and Method of Preparing the Same

AU - Curtis, Calvin

AU - Ginley, David

AU - Miedaner, Alexander

AU - Antonius, Marinus

AU - Hest, Maria

AU - Eldada, Louay

AU - Stanbery, Billy

PY - 2015

Y1 - 2015

N2 - Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.

AB - Liquid precursors containing indium and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and method of depositing a liquid precursor on a substrate are also disclosed.

M3 - Patent

M1 - 9,142,408 B2

Y2 - 2015/09/22

ER -

Liquid Precursor for Deposition of Indium Selenide and Method of Preparing the Same

Abstract

NLR Publication Number

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Cite this