Liquid Precursor for Deposition of Copper Selenide and Method of Preparing the Same

Marinus Van Hest; David Ginley; Calvin Curtis; Alexander Miedaner; Peter Hersh; Louay Eldada; Billy Stanbery

Liquid Precursor for Deposition of Copper Selenide and Method of Preparing the Same

Marinus Van Hest (Inventor)
, David Ginley (Inventor)
, Calvin Curtis (Inventor)
, Alexander Miedaner (Inventor)
, Peter Hersh (Inventor)
, Louay Eldada (Inventor)
, Billy Stanbery (Inventor)

National Renewable Energy Laboratory
HelioVolt Corporation

Research output: Patent

Abstract

Liquid precursors containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and methods of depositing a precursor on a substrate are also disclosed.

Original language	American English
Patent number	9,130,084
Filing date	8/09/15
State	Published - 2015

NLR Publication Number

NREL/PT-5K00-65875

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Cite this

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title = "Liquid Precursor for Deposition of Copper Selenide and Method of Preparing the Same",

abstract = "Liquid precursors containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and methods of depositing a precursor on a substrate are also disclosed.",

author = "\{Van Hest\}, Marinus and David Ginley and Calvin Curtis and Alexander Miedaner and Peter Hersh and Louay Eldada and Billy Stanbery",

year = "2015",

language = "American English",

publisher = "National Laboratory of the Rockies (NLR)",

address = "United States",

type = "Patent",

note = "9,130,084",

}

TY - PAT

T1 - Liquid Precursor for Deposition of Copper Selenide and Method of Preparing the Same

AU - Van Hest, Marinus

AU - Ginley, David

AU - Curtis, Calvin

AU - Miedaner, Alexander

AU - Hersh, Peter

AU - Eldada, Louay

AU - Stanbery, Billy

PY - 2015

Y1 - 2015

N2 - Liquid precursors containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and methods of depositing a precursor on a substrate are also disclosed.

AB - Liquid precursors containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semiconductor applications are disclosed. Methods of preparing such liquid precursors and methods of depositing a precursor on a substrate are also disclosed.

M3 - Patent

M1 - 9,130,084

Y2 - 2015/09/08

PB - National Laboratory of the Rockies (NLR)

ER -

Liquid Precursor for Deposition of Copper Selenide and Method of Preparing the Same

Abstract

NLR Publication Number

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