Impurity/Defect Analysis of HEM Silicon

    Research output: Contribution to conference › Paper

    Original languageAmerican English
    Pages13-18
    Number of pages6
    StatePublished - 1994
    EventRole of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop - Vail, Colorado
    Duration: 16 Aug 1993 → 18 Aug 1993

    Conference

    ConferenceRole of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop
    CityVail, Colorado
    Period16/08/93 → 18/08/93

    NLR Publication Number

    • ACNR/CP-15588

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