Abstract
The bonded species in hydrogenated fluorinated amorphous silicon (a-Si:H:F) have been identified in the infrared spectra as SiH2 (2100, 890, and 630 cm-1), SiH (2000 and 630 cm-1), SiF4 (1015 cm-1), SiF2 (930 cm-1), and SiF (830 cm-1), or alternatively as SiH (2000 and 630 cm-1), SiF4 (1015 cm-1), SiF2 (930 cm-1), and SiHF (2100, 890, 830, and 630 cm-1). To distinguish between these configurations, we have deposited deuterated fluorinated amorphous silicon (a-Si:D:F) by dc glow discharge and measured the infrared spectrum. Based on the isotopic shifts of the vibrational modes, we conclude that SiHF is not present, and thus support the former assignments.
| Original language | American English |
|---|---|
| Pages (from-to) | 7245-7248 |
| Number of pages | 4 |
| Journal | Physical Review B |
| Volume | 42 |
| Issue number | 11 |
| DOIs | |
| State | Published - 1990 |
NLR Publication Number
- ACNR/JA-212-11659
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