| Original language | American English |
|---|---|
| Pages | 99-106 |
| Number of pages | 8 |
| State | Published - 1994 |
| Event | Role of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop - Vail, Colorado Duration: 16 Aug 1993 → 18 Aug 1993 |
Conference
| Conference | Role of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop |
|---|---|
| City | Vail, Colorado |
| Period | 16/08/93 → 18/08/93 |
Bibliographical note
Work performed by Department of Mechanical Engineering and Materials Science, Duke University, Durham, North Carolina Work performed by Physics Department, Texas Tech University, Lubbock, TexasNLR Publication Number
- ACNR/CP-15590
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