Highly Conductive Textured Molybdenum Doped Indium Oxide Thin Films

Highly Conductive Textured Molybdenum Doped Indium Oxide Thin Films

NREL

Research output: Contribution to conference › Paper

Abstract

We report on the pulsed laser deposition (PLD) of Mo-doped indium oxide (IMO) films with mobilities of up to 125 cm2/Vsec. Films have been grown from targets with 1-4 wt. % molybdenum. The optimum electrical and optical properties were obtained with the 2% target and yielded a maximum conductivity of 3717 S/cm with mobilities of 99 cm2/V-sec on (100) yttria stabilized zirconia (YSZ) singlecrystal substrates. Films also exhibit greater than 90% transparency in the visible range. Compared to commercial indium tin oxide (ITO) films, these PLD-grown IMO films have similar conductivity but since they have substantially higher mobility they have a correspondingly lower carrier concentration. The lower carrier concentration should extend the infrared window of the transparency for filmsof the same conductivity. This may lead to improved performance in a number of applications requiring improved performance TCOs.

Original language	American English
Number of pages	6
State	Published - 2003
Event	National Center for Photovoltaics (NCPV) and Solar Program Review Meeting - Denver, Colorado Duration: 24 Mar 2003 → 26 Mar 2003

Conference

Conference	National Center for Photovoltaics (NCPV) and Solar Program Review Meeting
City	Denver, Colorado
Period	24/03/03 → 26/03/03

NLR Publication Number

NREL/CP-520-33596

Keywords

IMO
pulsed laser deposition
solar cells
TCO
thin films

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title = "Highly Conductive Textured Molybdenum Doped Indium Oxide Thin Films",

abstract = "We report on the pulsed laser deposition (PLD) of Mo-doped indium oxide (IMO) films with mobilities of up to 125 cm2/Vsec. Films have been grown from targets with 1-4 wt. \% molybdenum. The optimum electrical and optical properties were obtained with the 2\% target and yielded a maximum conductivity of 3717 S/cm with mobilities of 99 cm2/V-sec on (100) yttria stabilized zirconia (YSZ) singlecrystal substrates. Films also exhibit greater than 90\% transparency in the visible range. Compared to commercial indium tin oxide (ITO) films, these PLD-grown IMO films have similar conductivity but since they have substantially higher mobility they have a correspondingly lower carrier concentration. The lower carrier concentration should extend the infrared window of the transparency for filmsof the same conductivity. This may lead to improved performance in a number of applications requiring improved performance TCOs.",

keywords = "IMO, pulsed laser deposition, solar cells, TCO, thin films",

author = "NREL",

year = "2003",

language = "American English",

note = "National Center for Photovoltaics (NCPV) and Solar Program Review Meeting ; Conference date: 24-03-2003 Through 26-03-2003",

}

TY - CONF

T1 - Highly Conductive Textured Molybdenum Doped Indium Oxide Thin Films

AU - NREL, null

PY - 2003

Y1 - 2003

N2 - We report on the pulsed laser deposition (PLD) of Mo-doped indium oxide (IMO) films with mobilities of up to 125 cm2/Vsec. Films have been grown from targets with 1-4 wt. % molybdenum. The optimum electrical and optical properties were obtained with the 2% target and yielded a maximum conductivity of 3717 S/cm with mobilities of 99 cm2/V-sec on (100) yttria stabilized zirconia (YSZ) singlecrystal substrates. Films also exhibit greater than 90% transparency in the visible range. Compared to commercial indium tin oxide (ITO) films, these PLD-grown IMO films have similar conductivity but since they have substantially higher mobility they have a correspondingly lower carrier concentration. The lower carrier concentration should extend the infrared window of the transparency for filmsof the same conductivity. This may lead to improved performance in a number of applications requiring improved performance TCOs.

AB - We report on the pulsed laser deposition (PLD) of Mo-doped indium oxide (IMO) films with mobilities of up to 125 cm2/Vsec. Films have been grown from targets with 1-4 wt. % molybdenum. The optimum electrical and optical properties were obtained with the 2% target and yielded a maximum conductivity of 3717 S/cm with mobilities of 99 cm2/V-sec on (100) yttria stabilized zirconia (YSZ) singlecrystal substrates. Films also exhibit greater than 90% transparency in the visible range. Compared to commercial indium tin oxide (ITO) films, these PLD-grown IMO films have similar conductivity but since they have substantially higher mobility they have a correspondingly lower carrier concentration. The lower carrier concentration should extend the infrared window of the transparency for filmsof the same conductivity. This may lead to improved performance in a number of applications requiring improved performance TCOs.

KW - IMO

KW - pulsed laser deposition

KW - solar cells

KW - TCO

KW - thin films

M3 - Paper

T2 - National Center for Photovoltaics (NCPV) and Solar Program Review Meeting

Y2 - 24 March 2003 through 26 March 2003

ER -

Highly Conductive Textured Molybdenum Doped Indium Oxide Thin Films

Abstract

Conference

NLR Publication Number

Keywords

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