High-Quality Hydrogen-Diluted a-SiNx:H Films Deposited by Hot-Wire Chemical Vapor Deposition
- Fengzhen Liu
- , Lynn Gedvilas
- , Brian Keyes
- , Errol Sanchez
- , Shulin Wang
- , Qi Wang
- National Renewable Energy Laboratory
- University of Chinese Academy of Sciences
- Applied Materials Incorporated
Research output: Contribution to conference › Paper › peer-review