@article{8f03b8c7ec834dfd9566dcf2bf6d8169,
title = "Formation of Submicron Oxide Widths on Aluminum in the Presence of a 2 keV Electron Beam and CO2 or N20",
author = "Pitts, \{J. R.\} and Massopust, \{T. P.\} and Czanderna, \{A. W.\} and Kazmerski, \{L. L.\}",
year = "1986",
month = mar,
day = "1",
doi = "10.1116/1.573435",
language = "American English",
volume = "4",
pages = "241--243",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "2",
}