Films and Devices Deposited by HWC VD at Ultra High Deposition Rates

Research output: Contribution to conference › Paper

Original language	American English
Pages	A3.3.1-A3.3.6
State	Published - 2001
Event	Amorphous and Heterogeneous Silicon-Based Films 2001: Materials Research Society Symposium - San Francisco, California Duration: 16 Apr 2001 → 20 Apr 2001

Conference	Amorphous and Heterogeneous Silicon-Based Films 2001: Materials Research Society Symposium
City	San Francisco, California
Period	16/04/01 → 20/04/01

NLR Publication Number

@conference{b0a8d376a6554574ace5d6f80af268d2,

title = "Films and Devices Deposited by HWC VD at Ultra High Deposition Rates",

author = "NREL",

year = "2001",

language = "American English",

pages = "A3.3.1--A3.3.6",

note = "Amorphous and Heterogeneous Silicon-Based Films 2001: Materials Research Society Symposium ; Conference date: 16-04-2001 Through 20-04-2001",

}