Effects of Different Plasma Species (Atomic N, Metastable N*2, and Ions) on the Optical Properties of Dilute Nitride Materials Grown by Plasma-Assisted Molecular-Beam Epitaxy
- Michael M. Oye
- , Terry J. Mattord
- , Gary A. Hallock
- , Seth R. Bank
- , Mark A. Wistey
- , Jason M. Reifsnider
- , Aaron J. Ptak
- , Homan B. Yuen
- , James S. Harris
- , Archie L. Holmes
- University of Texas at Austin
- University of California at Santa Barbara
- Samsung Austin Semiconductor
- Stanford University
- University of Virginia
Research output: Contribution to journal › Article › peer-review
15
Scopus Citations