| Original language | American English |
|---|---|
| Pages (from-to) | 805-809 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 17 |
| Issue number | 3 |
| DOIs | |
| State | Published - 1999 |
NLR Publication Number
- NREL/JA-520-23550
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