Doping of Hydrogenated Amorphous Silicon Films Prepared by Laser-Induced Chemical Vapor Deposition

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	American English
Title of host publication	Beam-Induced Chemical Processes
Editors	R. J. von Gutfield, J. E. Greene, H. Schlossberg
Pages	105-107
State	Published - 1985

NLR Publication Number

@inbook{d3a82b7553d4417da671c2b11ce1f80d,

title = "Doping of Hydrogenated Amorphous Silicon Films Prepared by Laser-Induced Chemical Vapor Deposition",

author = "NREL",

year = "1985",

language = "American English",

pages = "105--107",

editor = "\{von Gutfield\}, \{R. J.\} and Greene, \{J. E.\} and H. Schlossberg",

booktitle = "Beam-Induced Chemical Processes",

}