Direct-Write InkJet Printing for Fabrication of Barium Strontium Titanate-Based Tunable Circuits

T. Kaydanova; A. Miedaner; J. D. Perkins; C. Curtis; J. L. Alleman; D. S. Ginley

doi:10.1016/j.tsf.2006.10.009

Direct-Write InkJet Printing for Fabrication of Barium Strontium Titanate-Based Tunable Circuits

T. Kaydanova
, A. Miedaner
, J. D. Perkins
, C. Curtis
, J. L. Alleman
, D. S. Ginley

National Renewable Energy Laboratory

Research output: Contribution to journal › Article › peer-review

48 Scopus Citations

Abstract

Tunable capacitors with up to 30% tuning and a loss tangent (tanδ) less than 0.002 at 1 MHz were fabricated from Ba_0.6Sr_0.4TiO₃ (BST) films using inkjet-printed liquid metalorganic precursors. BST films of various thicknesses were produced by printing multiple stacks of the individual inkjet-printed layers. The dielectric constant of the printed films increased as a function of thickness. The largest dielectric constant, 1000, and the highest tunability, 30%, were measured on a 420 nm thick film, the thickest film studied in this work. Spray-printed silver contacts were employed and demonstrated good adhesion and good electrical contact to the inkjet-printed BST films. This also demonstrated proof of principle for direct-write printing of metal contacts onto BST films from metalorganic sources.

Original language	American English
Pages (from-to)	3820-3824
Number of pages	5
Journal	Thin Solid Films
Volume	515
Issue number	7-8
DOIs	https://doi.org/10.1016/j.tsf.2006.10.009 https://doi.org/10.1016/j.tsf.2006.10.009
State	Published - 2007

NLR Publication Number

NREL/JA-520-37981

Keywords

BST
Direct write
Inkjet
Tunable circuits

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title = "Direct-Write InkJet Printing for Fabrication of Barium Strontium Titanate-Based Tunable Circuits",

abstract = "Tunable capacitors with up to 30\% tuning and a loss tangent (tanδ) less than 0.002 at 1 MHz were fabricated from Ba0.6Sr0.4TiO3 (BST) films using inkjet-printed liquid metalorganic precursors. BST films of various thicknesses were produced by printing multiple stacks of the individual inkjet-printed layers. The dielectric constant of the printed films increased as a function of thickness. The largest dielectric constant, 1000, and the highest tunability, 30\%, were measured on a 420 nm thick film, the thickest film studied in this work. Spray-printed silver contacts were employed and demonstrated good adhesion and good electrical contact to the inkjet-printed BST films. This also demonstrated proof of principle for direct-write printing of metal contacts onto BST films from metalorganic sources.",

keywords = "BST, Direct write, Inkjet, Tunable circuits",

author = "T. Kaydanova and A. Miedaner and Perkins, \{J. D.\} and C. Curtis and Alleman, \{J. L.\} and Ginley, \{D. S.\}",

year = "2007",

doi = "10.1016/j.tsf.2006.10.009",

language = "American English",

volume = "515",

pages = "3820--3824",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "7-8",

}

TY - JOUR

T1 - Direct-Write InkJet Printing for Fabrication of Barium Strontium Titanate-Based Tunable Circuits

AU - Kaydanova, T.

AU - Miedaner, A.

AU - Perkins, J. D.

AU - Curtis, C.

AU - Alleman, J. L.

AU - Ginley, D. S.

PY - 2007

Y1 - 2007

N2 - Tunable capacitors with up to 30% tuning and a loss tangent (tanδ) less than 0.002 at 1 MHz were fabricated from Ba0.6Sr0.4TiO3 (BST) films using inkjet-printed liquid metalorganic precursors. BST films of various thicknesses were produced by printing multiple stacks of the individual inkjet-printed layers. The dielectric constant of the printed films increased as a function of thickness. The largest dielectric constant, 1000, and the highest tunability, 30%, were measured on a 420 nm thick film, the thickest film studied in this work. Spray-printed silver contacts were employed and demonstrated good adhesion and good electrical contact to the inkjet-printed BST films. This also demonstrated proof of principle for direct-write printing of metal contacts onto BST films from metalorganic sources.

AB - Tunable capacitors with up to 30% tuning and a loss tangent (tanδ) less than 0.002 at 1 MHz were fabricated from Ba0.6Sr0.4TiO3 (BST) films using inkjet-printed liquid metalorganic precursors. BST films of various thicknesses were produced by printing multiple stacks of the individual inkjet-printed layers. The dielectric constant of the printed films increased as a function of thickness. The largest dielectric constant, 1000, and the highest tunability, 30%, were measured on a 420 nm thick film, the thickest film studied in this work. Spray-printed silver contacts were employed and demonstrated good adhesion and good electrical contact to the inkjet-printed BST films. This also demonstrated proof of principle for direct-write printing of metal contacts onto BST films from metalorganic sources.

KW - BST

KW - Direct write

KW - Inkjet

KW - Tunable circuits

UR - https://www.scopus.com/pages/publications/33846913020

U2 - 10.1016/j.tsf.2006.10.009

DO - 10.1016/j.tsf.2006.10.009

M3 - Article

AN - SCOPUS:33846913020

SN - 0040-6090

VL - 515

SP - 3820

EP - 3824

JO - Thin Solid Films

JF - Thin Solid Films

IS - 7-8

ER -

Direct-Write InkJet Printing for Fabrication of Barium Strontium Titanate-Based Tunable Circuits

Abstract

NLR Publication Number

Keywords

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