@article{1034a990b48146119cb39dacc5640ec7,
title = "Diagnostics of Silane and Germane Radio Frequency Plasmas by Coherent Anti-Stokes Raman Spectroscopy",
author = "NREL",
note = "Work performed by Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California",
year = "1988",
doi = "10.1063/1.99746",
language = "American English",
volume = "52",
pages = "2022--2024",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "24",
}