Diagnostics of Glow Discharges Used to Produce Hydrogenated Amorphous Silicon Films; A Subcontract Report; 15 April 1984 - 14 April 1985

Research output: NLR › Subcontract Report

Original language	American English
Publisher	National Laboratory of the Rockies (NLR)
Number of pages	38
State	Published - 1985

Work performed by National Bureau of Standards, Boulder, Colorado

NLR Publication Number

@misc{69edbab99bbb40fea300065eee74d602,

title = "Diagnostics of Glow Discharges Used to Produce Hydrogenated Amorphous Silicon Films; A Subcontract Report; 15 April 1984 - 14 April 1985",

author = "NREL",

note = "Work performed by National Bureau of Standards, Boulder, Colorado",

year = "1985",

language = "American English",

publisher = "National Laboratory of the Rockies (NLR)",

address = "United States",

type = "Other",

}