Diagnostics of Glow Discharges Used to Produce Hydrogenated Amorphous Silicon Films, Annual Subcontract Report, 15 April 1986 - 14 June 1987

Diagnostics of Glow Discharges Used to Produce Hydrogenated Amorphous Silicon Films, Annual Subcontract Report, 15 April 1986 - 14 June 1987

NREL

Research output: NLR › Subcontract Report

Original language	American English
Publisher	National Laboratory of the Rockies (NLR)
Number of pages	52
State	Published - 1988

Bibliographical note

Work performed by National Bureau of Standards and University of Colorado, Boulder, Colorado

NLR Publication Number

SERI/SR-STR-211-3288

Cite this

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title = "Diagnostics of Glow Discharges Used to Produce Hydrogenated Amorphous Silicon Films, Annual Subcontract Report, 15 April 1986 - 14 June 1987",

author = "NREL",

note = "Work performed by National Bureau of Standards and University of Colorado, Boulder, Colorado",

year = "1988",

language = "American English",

publisher = "National Laboratory of the Rockies (NLR)",

address = "United States",

type = "Other",

}