Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; October 15, 1982-January 14, 1983

Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; October 15, 1982-January 14, 1983

NREL

Research output: NLR › Subcontract Report

Original language	American English
Publisher	National Laboratory of the Rockies (NLR)
Number of pages	9
State	Published - 1983

Bibliographical note

Work performed by University of Colorado, Boulder, Colorado, and National Bureau of Standards, Boulder, Colorado

NLR Publication Number

SERI/PR-02085-1-T3

Other Report Number

SERI/PR-02085-1-T3

Cite this

@misc{79ea9c43e1584504bdbc19ef76277a1b,

title = "Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; October 15, 1982-January 14, 1983",

author = "NREL",

note = "Work performed by University of Colorado, Boulder, Colorado, and National Bureau of Standards, Boulder, Colorado",

year = "1983",

language = "American English",

publisher = "National Laboratory of the Rockies (NLR)",

address = "United States",

type = "Other",

}

TY - GEN

T1 - Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; October 15, 1982-January 14, 1983

AU - NREL, null

N1 - Work performed by University of Colorado, Boulder, Colorado, and National Bureau of Standards, Boulder, Colorado

PY - 1983

Y1 - 1983

M3 - Subcontract Report

PB - National Laboratory of the Rockies (NLR)

ER -