Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; July 15, 1981-October 14, 1981

Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; July 15, 1981-October 14, 1981

NREL

Research output: NLR › Subcontract Report

Original language	American English
Publisher	National Laboratory of the Rockies (NLR)
Number of pages	13
State	Published - 1981

Bibliographical note

Work performed by University of Colorado

NLR Publication Number

SERI/PR-9053-1-T5

Other Report Number

SERI/PR-9053-1-T5

Cite this

@misc{441956aaaef14ab8a22081a5b7d46f9e,

title = "Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; July 15, 1981-October 14, 1981",

author = "NREL",

note = "Work performed by University of Colorado",

year = "1981",

language = "American English",

publisher = "National Laboratory of the Rockies (NLR)",

address = "United States",

type = "Other",

}