Deposition Schemes for Low Cost Transparent Conductors for Photovoltaics

Deposition Schemes for Low Cost Transparent Conductors for Photovoltaics

NREL

Research output: Contribution to conference › Paper

Abstract

Production requirements for transparent conductors for thin film photovoltaics are reviewed, with particular reference to magnetron sputtered zinc oxide. On-going optimization processes for ZnO:Al prepared on 0.43 m2 substrates by bipolar, reactive sputtering from ZnO:Al2O3 targets and by reactive sputtering from a Zn:Al target are described. Optical emission from the plasma is used to study thestate of the sputtering target. Attention is drawn to the spatial dependence of deposition conditions under the cathode.

Original language	American English
Pages	467-477
Number of pages	11
State	Published - 1996
Event	Thin Films for Photovoltaic and Related Device Applications: Materials Research Society Symposium - San Francisco, California Duration: 8 Apr 1996 → 11 Apr 1996

Conference

Conference	Thin Films for Photovoltaic and Related Device Applications: Materials Research Society Symposium
City	San Francisco, California
Period	8/04/96 → 11/04/96

Bibliographical note

Work performed by Energy Photovoltaics, Inc., Princeton, New Jersey

NLR Publication Number

NREL/CP-23041

Cite this

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title = "Deposition Schemes for Low Cost Transparent Conductors for Photovoltaics",

abstract = "Production requirements for transparent conductors for thin film photovoltaics are reviewed, with particular reference to magnetron sputtered zinc oxide. On-going optimization processes for ZnO:Al prepared on 0.43 m2 substrates by bipolar, reactive sputtering from ZnO:Al2O3 targets and by reactive sputtering from a Zn:Al target are described. Optical emission from the plasma is used to study thestate of the sputtering target. Attention is drawn to the spatial dependence of deposition conditions under the cathode.",

author = "NREL",

note = "Work performed by Energy Photovoltaics, Inc., Princeton, New Jersey; Thin Films for Photovoltaic and Related Device Applications: Materials Research Society Symposium ; Conference date: 08-04-1996 Through 11-04-1996",

year = "1996",

language = "American English",

pages = "467--477",

}

TY - CONF

T1 - Deposition Schemes for Low Cost Transparent Conductors for Photovoltaics

AU - NREL, null

N1 - Work performed by Energy Photovoltaics, Inc., Princeton, New Jersey

PY - 1996

Y1 - 1996

N2 - Production requirements for transparent conductors for thin film photovoltaics are reviewed, with particular reference to magnetron sputtered zinc oxide. On-going optimization processes for ZnO:Al prepared on 0.43 m2 substrates by bipolar, reactive sputtering from ZnO:Al2O3 targets and by reactive sputtering from a Zn:Al target are described. Optical emission from the plasma is used to study thestate of the sputtering target. Attention is drawn to the spatial dependence of deposition conditions under the cathode.

AB - Production requirements for transparent conductors for thin film photovoltaics are reviewed, with particular reference to magnetron sputtered zinc oxide. On-going optimization processes for ZnO:Al prepared on 0.43 m2 substrates by bipolar, reactive sputtering from ZnO:Al2O3 targets and by reactive sputtering from a Zn:Al target are described. Optical emission from the plasma is used to study thestate of the sputtering target. Attention is drawn to the spatial dependence of deposition conditions under the cathode.

M3 - Paper

SP - 467

EP - 477

T2 - Thin Films for Photovoltaic and Related Device Applications: Materials Research Society Symposium

Y2 - 8 April 1996 through 11 April 1996

ER -

Deposition Schemes for Low Cost Transparent Conductors for Photovoltaics

Abstract

Conference

Bibliographical note

NLR Publication Number

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Cite this