Controlled Samples for Silicon Defect and Impurity Studies

Controlled Samples for Silicon Defect and Impurity Studies

NREL

Research output: Contribution to conference › Paper

Original language	American English
Pages	42-45
Number of pages	4
State	Published - 1995
Event	Fifth Workshop on the Role of Impurities and Defects in Silicon Device Processing: Workshop - Copper Mountain, Colorado Duration: 13 Aug 1995 → 16 Aug 1995

Conference

Conference	Fifth Workshop on the Role of Impurities and Defects in Silicon Device Processing: Workshop
City	Copper Mountain, Colorado
Period	13/08/95 → 16/08/95

NLR Publication Number

NREL/CP-20059

Cite this

@conference{371d0c0b48a5415b8ccc1f4ad6509ea9,

title = "Controlled Samples for Silicon Defect and Impurity Studies",

author = "NREL",

year = "1995",

language = "American English",

pages = "42--45",

note = "Fifth Workshop on the Role of Impurities and Defects in Silicon Device Processing: Workshop ; Conference date: 13-08-1995 Through 16-08-1995",

}