| Original language | American English |
|---|---|
| Pages (from-to) | 1239-1245 |
| Number of pages | 7 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 5 |
| Issue number | 4 |
| DOIs | |
| State | Published - 1987 |
NLR Publication Number
- ACNR/JA-212-9833
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