@article{9e8ee217ed1a49f380777dc53f3015d7,
title = "Applications of Real-Time and Mapping Spectroscopic Ellipsometry for Process Development and Optimization in Hydrogenated Silicon Thin-Film Photovoltaics Technology",
author = "Lila Dahal and Jason Stoke and Zhiquan Huang and Ambalanath Shan and Andre Ferlauto and Christopher Wronski and Robert Collins and Nikolas Podraza",
year = "2014",
doi = "10.1016/j.solmat.2014.01.028",
language = "American English",
volume = "129",
pages = "32--56",
journal = "Solar Energy Materials and Solar Cells",
issn = "0927-0248",
publisher = "Elsevier B.V.",
}