Analysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge

Analysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge

NREL

Research output: Contribution to conference › Paper

Original language	American English
Pages	115-120
Number of pages	6
State	Published - 1999
Event	Materials Research Society Symposium - San Francisco, California Duration: 5 Apr 1999 → 9 Apr 1999

Conference

Conference	Materials Research Society Symposium
City	San Francisco, California
Period	5/04/99 → 9/04/99

Bibliographical note

Work performed by United Solar Systems Corp., Troy, Michigan; and JILA, National Institute of Standards and Technology and University of Colorado, Boulder, Colorado

NLR Publication Number

NREL/CP-520-28442

Cite this

@conference{c590050d83be467cb1a132c9e3d53ecc,

title = "Analysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge",

author = "NREL",

note = "Work performed by United Solar Systems Corp., Troy, Michigan; and JILA, National Institute of Standards and Technology and University of Colorado, Boulder, Colorado; Materials Research Society Symposium ; Conference date: 05-04-1999 Through 09-04-1999",

year = "1999",

language = "American English",

pages = "115--120",

}

TY - CONF

T1 - Analysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge

AU - NREL, null

N1 - Work performed by United Solar Systems Corp., Troy, Michigan; and JILA, National Institute of Standards and Technology and University of Colorado, Boulder, Colorado

PY - 1999

Y1 - 1999

M3 - Paper

SP - 115

EP - 120

T2 - Materials Research Society Symposium

Y2 - 5 April 1999 through 9 April 1999

ER -