Amorphous and Microcrystalline Silicon by ECR-CVD using Highly Dilute Silane Mixtures

doi:10.1109/PVSC.1997.654179

Amorphous and Microcrystalline Silicon by ECR-CVD using Highly Dilute Silane Mixtures

NREL

Research output: Contribution to conference › Paper

Original language	American English
Pages	675-678
Number of pages	4
DOIs	https://doi.org/10.1109/PVSC.1997.654179
State	Published - 1997
Event	Twenty Sixth IEEE Photovoltaic Specialists Conference - Anaheim, California Duration: 29 Sep 1997 → 3 Oct 1997

Conference

Conference	Twenty Sixth IEEE Photovoltaic Specialists Conference
City	Anaheim, California
Period	29/09/97 → 3/10/97

Bibliographical note

Work performed by State University of New York, Amherst, New York; Evergreen Solar, Waltham, Massachusetts

NLR Publication Number

NREL/CP-520-24986

Access to Document

10.1109/PVSC.1997.654179

Cite this

@conference{1836f0e2e67d4fe4965247c7117edc2d,

title = "Amorphous and Microcrystalline Silicon by ECR-CVD using Highly Dilute Silane Mixtures",

author = "NREL",

note = "Work performed by State University of New York, Amherst, New York; Evergreen Solar, Waltham, Massachusetts; Twenty Sixth IEEE Photovoltaic Specialists Conference ; Conference date: 29-09-1997 Through 03-10-1997",

year = "1997",

doi = "10.1109/PVSC.1997.654179",

language = "American English",

pages = "675--678",

}

TY - CONF

T1 - Amorphous and Microcrystalline Silicon by ECR-CVD using Highly Dilute Silane Mixtures

AU - NREL, null

N1 - Work performed by State University of New York, Amherst, New York; Evergreen Solar, Waltham, Massachusetts

PY - 1997

Y1 - 1997

U2 - 10.1109/PVSC.1997.654179

DO - 10.1109/PVSC.1997.654179

M3 - Paper

SP - 675

EP - 678

T2 - Twenty Sixth IEEE Photovoltaic Specialists Conference

Y2 - 29 September 1997 through 3 October 1997

ER -